ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,701,649, issued on Aug. 4, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).
"Antenna unit and substrate treating apparatus including the same" was invented by Dae Hyun Kim (Seoul, South Korea) and Kyung Hwan You (Gyeonggi-do, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "An antenna unit having a slot structure capable of achieving maximum emission efficiency and a substrate treating apparatus including the antenna unit are provided. The substrate treating apparatus includes: a chamber housing; a substrate support unit supporting a substrate; a showerhead unit providing a process gas, which is for treating the substrate, onto ...