US Patent Issued to SEMES on Aug. 25 for "Mixing device, substrate processing apparatus including the same, and substrate processing method" (South Korean Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,714,973, issued on Aug. 25, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Mixing device, substrate processing apparatus including the same, and substrate processing method" was invented by Gu Yeol An (Busan, South Korea), Do Gyeong Ha (Daegu, South Korea), Moon Soon Choi (Chungcheongnam-do, South Korea), Bu Young Jung (Chungcheongnam-do, South Korea), Kyung Hun Lee (Chungcheongnam-do, South Korea) and Chae Young Lim (Chungcheongnam-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for processing a substrate includes a mixing nozzle having a mixing space that is shaped as an inverted cone, the mixing nozzle i...