ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,153, issued on Aug. 18, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).
"Impedance matching circuit, power supply apparatus, and plasma processing equipment including same" was invented by Hyun Jin Kim (Daegu, South Korea), Jung Hwan Lee (Ansan-si, South Korea), Galstyan Ogsen (Cheonan-si, South Korea), Sung Suk Wi (Yongin-si, South Korea) and Min Keun Bae (Hwaseong-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "An impedance matching circuit, which is provided for quick impedance matching, a power supply apparatus, and a plasma processing equipment including the same are provided. The impedance matching circuit includes a p...