ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,707,915, issued on Aug. 11, was assigned to Semes Co. Ltd. (Chungcheongnam-do, South Korea).
"Apparatus for treating substrate" was invented by Jong Doo Lee (Cheonan-si, South Korea), Seung Hoon Oh (Cheonan-si, South Korea), Jin Mo Jae (Cheonan-si, South Korea), Ki Bong Kim (Paju-si, South Korea) and Young Hun Lee (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a body; a fluid supply unit for supplying a treating fluid to a treating space within the body; and a fluid exhaust line for exhausting the treating fluid from the trea...