ALEXANDRIA, Va., April 21 -- United States Patent no. 12,610,782, issued on April 21, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).
"Support unit and apparatus for treating substrate" was invented by Soo Han Song (Gyeonggi-do, South Korea), Chul Goo Kim (Sejong-si, South Korea), Jung Bong Choi (Gyeonggi-do, South Korea), Cheol-Yong Shin (Seoul, South Korea) and Jae-Youl Kim (Gyeonggi-do, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a support unit for supporting a substrate, the support unit including: a heating member configured to transmit thermal energy to a supported substrate; a reflective plate disposed under the heating member and configured to reflect therm...