ALEXANDRIA, Va., April 21 -- United States Patent no. 12,605,748, issued on April 21, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).
"Liquid chemical tank module and liquid chemical supply apparatus including the same" was invented by Byungwoo Sim (Yongin-si, South Korea) and Bok Kyu Lee (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided are a liquid chemical tank module and a liquid chemical supply apparatus, the liquid chemical tank module including a tank body having a storage space capable of storing a liquid chemical, a gas ejector for ejecting an inert gas into the liquid chemical to reduce dissolved oxygen in the liquid chemical of the tank body, and a controll...