ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,983, issued on April 14, was assigned to Semes Co. Ltd. (Cheonan-si, South Korea).
"Home pot and apparatus for treating substrate" was invented by Ho Jong Hwang (Hwaseong-si, South Korea) and Do Yeon Kim (Yongin-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention provides a home pot. The home pot comprising: a housing having a cylindrical accommodation space of which the upper part is open and in which a nozzle tip can be accommodated, and has n injection flow paths formed on a sidewall in contact with the accommodation space; and a cleaning liquid supply portion provided in the housing and configured to supply a cl...