US Patent Issued to SEMES on April 14 for "Gas exhaust apparatus and intake line automatic closing apparatus used for gas exhaust apparatus" (South Korean Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,409, issued on April 14, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Gas exhaust apparatus and intake line automatic closing apparatus used for gas exhaust apparatus" was invented by Jehyoung Lee (Cheonan-si, South Korea), Joon Hwan Jang (Cheonan-si, South Korea), Shi Hyun Park (Pyeongtaek-si, South Korea) and Inhwang Park (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a gas exhaust apparatus for expelling a gas in a treatment space of a wafer treatment apparatus to outside, the gas exhaust apparatus including a main exhaust line connected to the treatment space, and an auxiliary exhaust line havi...