US Patent Issued to Semes, SAMSUNG ELECTRONICS on Oct. 20 for "Control device and substrate processing apparatus including the same" (South Korean Inventors)

Posted On: 2026-10-21

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,766,545, issued on Oct. 20, was assigned to Semes Co. Ltd. (South Korea) and SAMSUNG ELECTRONICS Co. Ltd. (South Korea).

"Control device and substrate processing apparatus including the same" was invented by Jin Yeong Sung (Cheonan-si, South Korea), Ki Hoon Choi (Cheonan-si, South Korea), Seung Un Oh (Cheonan-si, South Korea), Young Ho Park (Incheon, South Korea), Sang Hyeon Ryu (Cheonsan-si, South Korea), Jang Jin Lee (Seoul, South Korea), Hyun Yoon (Seoul, South Korea), Sang Gun Lee (Seoul, South Korea), Yu Jin Cho (Cheonan-si, South Korea), Ho Jong Hwang (Cheonan-si, South Korea), Jong Ju Park (Suwon-si, South Korea), Jong Keun Oh (Suwon-si, South Korea) and Yong Woo Kim (Suwon-si,...

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इस लेख के रीप्रिंट को खरीदने या इस प्रकाशन का पूरा फ़ीड प्राप्त करने के लिए, कृपया हमे संपर्क करें.

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US Patent Issued to Semes, SAMSUNG ELECTRONICS on Oct. 20 for "Control device and substrate processing apparatus including the same" (South Korean Inventors)