ALEXANDRIA, Va., July 21 -- United States Patent no. 12,690,407, issued on July 21, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea) and SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).
"Apparatus and method for processing substrate" was invented by Min Jung Kim (Chungcheongnam-do, South Korea), Jin Ah Han (Chungcheongnam-do, South Korea), Hee Hwan Kim (Sejong-si, South Korea), Yong Hoon Hong (Seoul, South Korea), Kyoung Suk Kim (Suwon-si, South Korea), Jong Hyeok Park (Suwon-si, South Korea), Jin Hyung Park (Suwon-si, South Korea), Dae Hyuk Chung (Suwon-si, South Korea) and Ji Hoon Cha (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus and method for processing a...