US Patent Issued to SEIKO EPSON on Sept. 15 for "Method of manufacturing vibration element" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 15 -- United States Patent no. 12,738,914, issued on Sept. 15, was assigned to SEIKO EPSON Corp. (Japan).

"Method of manufacturing vibration element" was invented by Keiichi Yamaguchi (Ina, Japan), Hiyori Sakata (Minowa, Japan), Shigeru Shiraishi (Ina, Japan) and Ryuta Nishizawa (Nagano, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of manufacturing a vibration element includes: a protective film forming step of forming a protective film on a first substrate surface of a crystal substrate; and a dry etching step of dry-etching the crystal substrate via the protective film. The protective film satisfies a relationship of T1greater thanT2greater thanT3, in which T1 is a t...