US Patent Issued to SEIKO EPSON on March 17 for "Method of manufacturing vibration element" (Japanese Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,581,860, issued on March 17, was assigned to SEIKO EPSON Corp. (Japan).

"Method of manufacturing vibration element" was invented by Keiichi Yamaguchi (Ina, Japan), Hiyori Sakata (Minowa, Japan), Shigeru Shiraishi (Ina, Japan) and Ryuta Nishizawa (Nagano, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of manufacturing a vibration element includes: a first protective film forming step of forming a first protective film on a first substrate surface of a crystal substrate; a first dry etching step of dry-etching the crystal substrate via the first protective film; a second protective film forming step of forming a second protective film on a...