US Patent Issued to SEIKO EPSON on July 28 for "Inertial sensor, method of manufacturing inertial sensor, and inertial measurement unit" (Japanese Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,693,307, issued on July 28, was assigned to SEIKO EPSON Corp. (Tokyo).

"Inertial sensor, method of manufacturing inertial sensor, and inertial measurement unit" was invented by Teruo Takizawa (Matsumoto, Japan), Kazunori Ueno (Tsuruoka, Japan) and Taiki Goto (Tsuruoka, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An inertial sensor includes: a substrate; an insulating film provided on a main surface of the substrate; a first semiconductor layer and a second semiconductor layer which are provided on an opposite-side surface of the insulating film from the substrate; a first oxide film provided on a first side surface of the first semiconductor la...