US Patent Issued to SEIKO EPSON on July 21 for "Method for manufacturing vibration power generation device and vibration device" (Japanese Inventors)

ALEXANDRIA, Va., July 21 -- United States Patent no. 12,689,312, issued on July 21, was assigned to SEIKO EPSON Corp. (Tokyo).

"Method for manufacturing vibration power generation device and vibration device" was invented by Katsuya Suzuki (Suwa, Japan), Yukio Yamauchi (Chino, Japan) and Takashi Miyata (Shiojiri, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for manufacturing a vibration power generation device includes: first silicon substrate patterning for patterning a first silicon substrate to form a first support portion and a fixed electrode finger; second silicon substrate patterning for patterning a second silicon layer of a second silicon substrate in which a first silicon layer and...