ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,754, issued on April 14, was assigned to SEIKO EPSON Corp. (Japan).
"MEMS device and inertial measurement unit" was invented by Satoru Tanaka (Chino, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A MEMS device of an embodiment includes a substrate, fixed electrode portions, a movable body, fixed electrode fixing portions, a wiring structure, and a first wire. The fixed electrode portions are fixed relative to the substrate. The movable body is movable relative to the substrate. The fixed electrode fixing portions are electrically coupled to the fixed electrode portions. The wiring structure is provided in the same layer as those of the movab...