US Patent Issued to SCREEN HOLDINGS on Sept. 1 for "Substrate processing apparatus" (Japanese Inventor)

ALEXANDRIA, Va., Sept. 1 -- United States Patent no. 12,727,423, issued on Sept. 1, was assigned to SCREEN HOLDINGS Co. LTD. (Japan).

"Substrate processing apparatus" was invented by Shuhei Nemoto (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "In an substrate processing apparatus according to the present invention, a chamber is configured so as to cover an internal space with a bottom wall, side walls extending from the periphery of the bottom wall, and a ceiling wall covering the upper end of the side walls. A plurality of base support members stand vertically upward from the bottom wall, and the base member is supported by upper end portions of these base support members. A so-called raised f...