US Patent Issued to SCREEN Holdings on Oct. 27 for "Centering device and substrate processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,777,888, issued on Oct. 27, was assigned to SCREEN Holdings Co. Ltd. (Kyoto, Japan).

"Centering device and substrate processing apparatus" was invented by Itsuki Kajino (Kyoto, Japan) and Shoyo Minami (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A centering device has three or more contact members each having a contact surface capable of contacting an end face of a substrate supported by a substrate support. These contact members are arranged to surround the substrate support in a horizontal plane with the contact surfaces facing an end face of the substrate. These contact members move toward the substrate in the mutually different direc...