US Patent Issued to SCREEN HOLDINGS on May 26 for "Substrate processing apparatus, abnormality detection method and non-transitory computer readable medium storing abnormality detection program" (Japanese Inventors)

ALEXANDRIA, Va., May 26 -- United States Patent no. 12,638,317, issued on May 26, was assigned to SCREEN HOLDINGS Co. LTD. (Japan).

"Substrate processing apparatus, abnormality detection method and non-transitory computer readable medium storing abnormality detection program" was invented by Tetsuya Yamamoto (Kyoto, Japan), Yumiko Hirato (Kyoto, Japan), Takehiro Sano (Kyoto, Japan) and Daiichi Kitagishi (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "In a substrate processing apparatus, a substrate is processed with use of a processing liquid. A first operation component and a second operation component are used in the substrate process. A first operation value of the first operation component a...