US Patent Issued to SCREEN HOLDINGS on March 31 for "Substrate alignment device, substrate processing apparatus, substrate alignment method and substrate processing method" (Japanese Inventors)

ALEXANDRIA, Va., March 31 -- United States Patent no. 12,593,654, issued on March 31, was assigned to SCREEN HOLDINGS Co. LTD. (Japan).

"Substrate alignment device, substrate processing apparatus, substrate alignment method and substrate processing method" was invented by Nobuaki Okita (Kyoto, Japan), Tomoyuki Shinohara (Kyoto, Japan), Junichi Ishii (Kyoto, Japan), Kazuki Nakamura (Kyoto, Japan), Takashi Shinohara (Kyoto, Japan), Takuma Takahashi (Kyoto, Japan), Yoshifumi Okada (Kyoto, Japan) and Hiroshi Kato (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate alignment device includes first and second support members that are arranged to be opposite to each other and be spaced apart fro...