US Patent Issued to SCREEN Holdings on March 17 for "Substrate support device, thermal processing apparatus, substrate support method, and thermal processing method" (Japanese Inventor)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,581,909, issued on March 17, was assigned to SCREEN Holdings Co. Ltd. (Kyoto, Japan).

"Substrate support device, thermal processing apparatus, substrate support method, and thermal processing method" was invented by Scott Prengle (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate support device relating to technology disclosed in the description of the present application includes: a holding plate for opposing a substrate bowable by being heated by irradiation with flash light; and a plurality of substrate support pins provided on the holding plate and being for supporting the substrate, wherein the plurality of substrate support ...