ALEXANDRIA, Va., July 16 -- United States Patent no. 12,672,518, issued on June 30, was assigned to SCREEN Holdings Co. Ltd. (Kyoto, Japan).
"Heat treatment susceptor and heat treatment apparatus" was invented by Hiroyasu Takehara (Kyoto, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A heat treatment susceptor holds a substrate when the substrate is irradiated with a flash of light from flash lamps to perform a heat treatment on the substrate. The heat treatment susceptor includes: a holding plate having a planar holding surface; and a plurality of substrate support bodies mounted upright on the holding surface, wherein a slit is formed around a position where at least one of the substrate support bod...