US Patent Issued to SCREEN Holdings on July 7 for "Substrate processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., July 7 -- United States Patent no. 12,677,622, issued on July 7, was assigned to SCREEN Holdings Co. Ltd. (Kyoto, Japan).

"Substrate processing apparatus" was invented by Tatsuhiro Suzuki (Kyoto, Japan), Akihiko Taki (Kyoto, Japan) and Yuta Nishimura (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Each of branch pipes has an internal space into which an atmosphere flows from a main pipe. A downstream damper is provided on the downstream side of an upstream damper in each of the branch pipes, and opens/closes the branch pipe. An upstream switching member switches a state of an upstream space between a state where the upstream space permits an inflow of an external atmosphere and ...