US Patent Issued to SCREEN Holdings on July 21 for "Substrate processing apparatus, substrate processing method, training data generating method, training method, training device, trained model generating method, and trained model" (Japanese Inventors)

ALEXANDRIA, Va., July 21 -- United States Patent no. 12,687,838, issued on July 21, was assigned to SCREEN Holdings Co. Ltd. (Japan).

"Substrate processing apparatus, substrate processing method, training data generating method, training method, training device, trained model generating method, and trained model" was invented by Masaki Inaba (Kyoto, Japan), Masayuki Otsuji (Kyoto, Japan) and Ayumi Higuchi (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing apparatus includes a substrate holder, a processing liquid supply section, an input information acquiring section, a sublimation drying process condition information acquiring section, and a controller. The input information...