US Patent Issued to SCREEN HOLDINGS on Feb. 17 for "Substrate processing method and sublimation drying processing agent" (Japanese Inventors)

ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,557,578, issued on Feb. 17, was assigned to SCREEN HOLDINGS Co. LTD. (Japan).

"Substrate processing method and sublimation drying processing agent" was invented by Yu Yamaguchi (Kyoto, Japan), Masaki Inaba (Kyoto, Japan) and Masayuki Otsuji (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention includes a liquid film formation step of supplying a processing liquid in which a sublimation drying processing agent obtained by mixing a first sublimable substance and a second sublimable substance which are different from each other in a eutectic composition or a near-eutectic composition is liquefied, onto a front surface of a subs...