ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,699,327, issued on Aug. 4, was assigned to SCREEN HOLDINGS Co. LTD. (Japan).
"Substrate processing apparatus" was invented by Jun Komori (Kyoto, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing apparatus includes a cup, an exhaust duct, a mist collecting member and a lid portion. The cup surrounds a substrate being processed with use of a processing liquid. The exhaust duct has an opening in a portion not overlapping with the cup in a plan view and forms an exhaust flow path for exhausting a gas in the cup. The mist collecting member is provided at a position overlapping with the opening and collects mist of the processing liqu...