ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,733,444, issued on Sept. 8, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Gyeonggi-do, South Korea).
"Electrostatic chuck" was invented by Junhyung Kim (Suwon-si, South Korea) and Hyunjoo Jeon (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "An electrostatic chuck comprising; an electrostatic chuck body configured to have a step protruding from a lower end thereof in a radial direction, an adhesive layer on an upper surface of the electrostatic chuck body, a ceramic puck configured to be adhered to the adhesive layer and configured to have an edge protruding from the upper surface of the electrostatic chuck body, and a sealing membe...