US Patent Issued to SAMSUNG ELECTRONICS on Oct. 27 for "Semiconductor process apparatus" (South Korean Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,775,216, issued on Oct. 27, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Semiconductor process apparatus" was invented by Kyoungwhan Oh (Suwon-si, South Korea), Donghyeong Kim (Suwon-si, South Korea), Eunhee Jeang (Suwon-si, South Korea), Iksun Park (Suwon-si, South Korea), Dahae Lee (Suwon-si, South Korea), Ohkug Kwon (Suwon-si, South Korea), Jeonggil Kim (Suwon-si, South Korea) and Jinhyuk Kim (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor process apparatus includes an extreme ultraviolet (EUV) light source; a mask stage configured to support a mask; a substrate stage configured to suppo...