US Patent Issued to SAMSUNG ELECTRONICS on Oct. 27 for "Plasma control apparatus and method using the same" (South Korean Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,776,477, issued on Oct. 27, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Plasma control apparatus and method using the same" was invented by Changho Kim (Suwon-si, South Korea), Donghyeon Na (Suwon-si, South Korea), Yoonbum Nam (Suwon-si, South Korea), Seungbo Shim (Suwon-si, South Korea), Kyungsun Kim (Suwon-si, South Korea) and Namkyun Kim (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A plasma control apparatus includes a first transmission line and a second transmission line transferring radio frequency (RF) power to a plasma chamber, a matcher disposed on the first transmission line a first plasma co...