US Patent Issued to SAMSUNG ELECTRONICS on Oct. 20 for "Plasma diagnosis device and manufacturing method of plasma diagnosis device" (South Korean Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,844, issued on Oct. 20, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Suwon-si, South Korea).

"Plasma diagnosis device and manufacturing method of plasma diagnosis device" was invented by Youn Sok Choi (Suwon-si, South Korea), Ju Hyun Kim (Suwon-si, South Korea), Hae Wook Park (Suwon-si, South Korea) and Young Yoon (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A plasma diagnosis device and a method for manufacturing the plasma diagnosis device are provided. The plasma diagnosis device includes: a process chamber in which processes using plasma are performed; a probe structure which includes a protective layer having a first f...