US Patent Issued to SAMSUNG ELECTRONICS on May 19 for "Semiconductor process device and method of monitoring semiconductor process" (South Korean Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,455, issued on May 19, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Suwon-si, South Korea).

"Semiconductor process device and method of monitoring semiconductor process" was invented by Jitae Park (Suwon-si, South Korea), Kwangho Lee (Suwon-si, South Korea), Seongjin In (Suwon-si, South Korea), Keonhee Lim (Suwon-si, South Korea), Yoonjae Kim (Suwon-si, South Korea), Ilwoo Kim (Suwon-si, South Korea), Sangki Nam (Suwon-si, South Korea) and Sejin Oh (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor process device includes a housing including a chamber where a substrate is processed, a viewport in a side wall of the...