US Patent Issued to SAMSUNG ELECTRONICS on May 19 for "Offset data correction method and semiconductor device manufacturing method including the same" (South Korean Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,438, issued on May 19, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Offset data correction method and semiconductor device manufacturing method including the same" was invented by Joongsuk Oh (Suwon-si, South Korea), Jinuk Byun (Suwon-si, South Korea), Hoyoung Kim (Suwon-si, South Korea), Hyunkyu Moon (Suwon-si, South Korea), Kiho Bae (Suwon-si, South Korea), Boun Yoon (Suwon-si, South Korea), Hojoon Lee (Suwon-si, South Korea) and Seunghoon Choi (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An offset data correction method includes measuring a measurement target that has undergone a chemical mechanic...