ALEXANDRIA, Va., May 19 -- United States Patent no. 12,630,926, issued on May 19, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Suwon-Si, South Korea).
"Device for manufacturing a semiconductor device and method for manufacturing a semiconductor device using the same" was invented by Jung Min Park (Seoul, South Korea), Su Hwan Kim (Seoul, South Korea) and Han Jin Lim (Hwaseong-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A device for manufacturing a semiconductor device is provided. The device for manufacturing a semiconductor device includes a tube extending in a first direction, and defining a reaction space therein and configured to accommodate a boat that is configured to receive a plur...