US Patent Issued to SAMSUNG ELECTRONICS on March 24 for "Monitoring unit and substrate treating apparatus including the same" (South Korean Inventors)

ALEXANDRIA, Va., March 24 -- United States Patent no. 12,585,197, issued on March 24, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Monitoring unit and substrate treating apparatus including the same" was invented by Yoon Sang Lee (Suwon-si, South Korea), Eun Hee Jeang (Suwon-si, South Korea), Dong Hyeong Kim (Suwon-si, South Korea), Teun Boeren (Suwon-si, South Korea), Jeong-Gil Kim (Suwon-si, South Korea), Kyung Bin Park (Suwon-si, South Korea) and Hyuck Shin (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A monitoring unit for measuring, in real time, the power of an EUV beam transmitted to a substrate and a substrate treating apparatus including the monitori...