ALEXANDRIA, Va., March 17 -- United States Patent no. 12,581,918, issued on March 17, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).
"Fabricating method for test element group" was invented by Sun Woo Kim (Suwon-si, South Korea), Min Hyung Kang (Suwon-si, South Korea), Min Seob Kim (Suwon-si, South Korea) and Chan Geun Ahn (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A fabricating method for a test element group is provided. The fabricating method for a test element group includes fabricating test areas generated in a scribe lane area, wherein fabricating of the test areas includes forming a plurality of fins protruding in a first direction on a substrate, cove...