ALEXANDRIA, Va., June 9 -- United States Patent no. 12,649,651, issued on June 9, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).
"Micro electro-mechanical system sensor" was invented by Choongho Rhee (Anyang-si, South Korea), Sungchan Kang (Hwaseong-si, South Korea), Cheheung Kim (Yongin-si, South Korea) and Yongseop Yoon (Seoul, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a micro electro-mechanical system (MEMS) sensor including a substrate including a first cavity, a first frame including a second cavity at least partially overlapping the first cavity, at least a portion of the first frame being spaced apart from the substrate, a plurality of resonators, ea...