US Patent Issued to SAMSUNG ELECTRONICS on June 23 for "Substrate processing apparatus" (South Korean Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,661,805, issued on June 23, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Substrate processing apparatus" was invented by Hyeon Dong Song (Suwon-si, South Korea), Jun Young Moon (Suwon-si, South Korea), Sang Woo Park (Suwon-si, South Korea), Un Ki Jeong (Suwon-si, South Korea), Ji Ho Uh (Suwon-si, South Korea) and Hyun Soo Chun (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing apparatus includes a body which includes an upper face and side faces, and extends in a first direction, a plurality of robot arms which are installed on the upper face of the body, extend in the first direction, ...