US Patent Issued to SAMSUNG ELECTRONICS on July 28 for "Precursor supply system" (South Korean Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,692,600, issued on July 28, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Precursor supply system" was invented by Kyungrim Kim (Suwon-si, South Korea), Youngeun Kim (Suwon-si, South Korea), Youngjun Kim (Suwon-si, South Korea), Jihoon Kim (Suwon-si, South Korea), Taekjung Kim (Suwon-si, South Korea) and Dongju Chang (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A precursor supply system includes a storage tank storing the precursor in a solid state; a transfer pipe connected to the storage tank to transfer the precursor in a solid state; a phase converter connected to the transfer pipe and sublimating th...