US Patent Issued to SAMSUNG ELECTRONICS on July 28 for "Focus ring and substrate processing apparatus including the same" (South Korean Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,695,068, issued on July 28, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Focus ring and substrate processing apparatus including the same" was invented by Dongseok Han (Daegu, South Korea), Seunghan Baek (Busan, South Korea), Kyung-Sun Kim (Suwon-si, South Korea), Nam Kyun Kim (Pyeongtaek-si, South Korea), Sang Ki Nam (Seongnam-si, South Korea), Kuihyun Yoon (Yongin-si, South Korea) and Kangmin Jeon (Hwaseong-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed are focus rings, substrate processing apparatuses including the same, and substrate processing methods using the same. The focus ring comprises a fir...