US Patent Issued to SAMSUNG ELECTRONICS on July 21 for "Electric field measuring apparatus and method of measuring electric field using the same" (South Korean Inventors)

ALEXANDRIA, Va., July 21 -- United States Patent no. 12,687,567, issued on July 21, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Electric field measuring apparatus and method of measuring electric field using the same" was invented by Jinyeong Yun (Yongin-si, South Korea), Meehyun Lim (Seoul, South Korea), Sungjin Kim (Suwon-si, South Korea), Masahiko Yamabe (Hwaseong-si, South Korea), Sungyeol Kim (Suwon-si, South Korea), Sungyong Lim (Seoul, South Korea) and Sunghwi Cho (Gwangju-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An electric field measuring apparatus includes an electrostatic chuck with a through hole and holding a wafer, a lift pin picking up the wafer...