ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,555,222, issued on Feb. 17, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Gyeonggi-do, South Korea).
"System and method for detecting defects" was invented by Ji Seong Jeong (Suwon-si, South Korea), Chang Hun Ko (Suwon-si, South Korea), Seung Eun Yu (Suwon-si, South Korea), Oh Hun Kwon (Suwon-si, South Korea) and Hyuck Joon Kwon (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A system for detecting defects includes a memory configured to store a program of instructions; and a processor configured execute the program of instructions to convert an SEM image into an image layout, determine a search space based on performing first layo...