US Patent Issued to SAMSUNG ELECTRONICS on Feb. 17 for "Semiconductor equipment monitoring apparatus, and semiconductor equipment including the semiconductor equipment monitoring apparatus" (South Korean Inventors)

ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,555,757, issued on Feb. 17, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Semiconductor equipment monitoring apparatus, and semiconductor equipment including the semiconductor equipment monitoring apparatus" was invented by Taekjin Kim (Suwon-si, South Korea), Meehyun Lim (Suwon-si, South Korea), Sungyeol Kim (Suwon-si, South Korea), Junbum Park (Suwon-si, South Korea), Sungyoung Yoon (Suwon-si, South Korea), Jinyeong Yun (Suwon-si, South Korea), Jungchul Lee (Suwon-si, South Korea), Sungyong Lim (Suwon-si, South Korea) and Sunghwi Cho (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor equipmen...