US Patent Issued to SAMSUNG ELECTRONICS on Feb. 17 for "Power generator with partial sinusoidal waveform, plasma processing apparatus including the same and method of manufacturing semiconductor device using the same" (South Korean Inventor)

ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,556,111, issued on Feb. 17, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Power generator with partial sinusoidal waveform, plasma processing apparatus including the same and method of manufacturing semiconductor device using the same" was invented by Hyuk Kim (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A power generator with partial sinusoidal waveform includes a resonance module circuit and a pulse module circuit. The resonance module circuit includes a plurality of resonance control switches, and generates a first output voltage by selectively turning on and off the plurality of resonance control swi...