ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,701,955, issued on Aug. 4, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).
"Inspection apparatus for semiconductor device" was invented by Jubok Lee (Suwon-si, South Korea), Soonyang Kwon (Suwon-si, South Korea), Kwangrak Kim (Suwon-si, South Korea), Jangryul Park (Suwon-si, South Korea), Jonghyeok Park (Suwon-si, South Korea) and Heesu Chung (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is an inspecting apparatus for semiconductor device including a chamber, a substrate stage within the chamber and configured to load a test wafer, the test wafer including a plurality of wiring layers, a milling devi...