US Patent Issued to SAMSUNG ELECTRONICS on Aug. 25 for "Liquid supply device with function of reducing generation of particles" (South Korean Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,716,416, issued on Aug. 25, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Suwon-si, South Korea).

"Liquid supply device with function of reducing generation of particles" was invented by Kyoungwhan Oh (Suwon-si, South Korea), Hokyun Kim (Suwon-si, South Korea), Kyung-Won Kang (Suwon-si, South Korea), Takashi Sasa (Suwon-si, South Korea) and Sanghyun Lim (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A liquid supply device that reduces particle generation includes a pump configured to supply a liquid to a nozzle within a wafer processing chamber, a controller configured to control the pump, and a main power source configured to sup...