ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,703,917, issued on Aug. 11, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).
"Substrate holding unit and substrate processing apparatus" was invented by Hwanyeol Park (Suwon-si, South Korea), Kyungnam Kang (Hwaseong-si, South Korea), Jeonghoon Nam (Suwon-si, South Korea), Sejin Kyung (Seoul, South Korea), Daewee Kong (Yongin-si, South Korea) and Taemin Kim (Seongnam-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate support unit includes: a ceramic body having a surface for supporting a substrate, the ceramic body including aluminum nitride (AlN), a heat generating resistor disposed in the ceramic body, and i...