US Patent Issued to SAMSUNG ELECTRONICS on April 21 for "Extreme ultraviolet source cleaning apparatus, EUV source cleaning method using the same, and substrate processing method including the same" (South Korean Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,607,944, issued on April 21, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Extreme ultraviolet source cleaning apparatus, EUV source cleaning method using the same, and substrate processing method including the same" was invented by Chulmin Cho (Suwon-si, South Korea), Youngduk Suh (Suwon-si, South Korea), Kyoungwhan Oh (Suwon-si, South Korea), Sanghyun Lim (Suwon-si, South Korea), Youngkyun Im (Suwon-si, South Korea), Jaehong Lim (Suwon-si, South Korea), Dohyun Jung (Suwon-si, South Korea), Seok Heo (Suwon-si, South Korea) and Youngho Hwang (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate proce...