ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,699,315, issued on Aug. 4, was assigned to SAMSUNG ELECTRONICS Co. LTD. and RESEARCH AND BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY.
"Methods of manufacturing a pellicle having graphite layer" was invented by Mun Ja Kim (Hwaseong-si, South Korea), Ji-Beom Yoo (Seoul, South Korea), Qicheng Hu (Suwon-si, South Korea), Changyoung Jeong (Yongin-si, South Korea), Ki-Bong Nam (Suwon-si, South Korea) and Jin-Ho Yeo (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for manufacturing a pellicle according to the technical idea of the present invention includes preparing a support substrate, forming a catalyst layer including nickel (N...