ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,749,665, issued on Sept. 29, was assigned to SAMSUNG DISPLAY Co. LTD. (Gyeonggi-Do, South Korea).
"Sputtering apparatus" was invented by Gi Woon Sung (Yongin-si, South Korea), Myung Soo Huh (Yongin-si, South Korea), Nam Wook Kang (Yongin-si, South Korea), Jin Soo Park (Yongin-si, South Korea), Sung Kyu Yang (Yongin-si, South Korea), Doo Seon Yu (Yongin-si, South Korea), You Jong Lee (Yongin-si, South Korea) and Jeong Il Lee (Yongin-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A sputtering apparatus includes: a chamber; a target disposed inside the chamber; a coil disposed adjacent to the target; a moving member on which the coil is di...