ALEXANDRIA, Va., June 16 -- United States Patent no. 12,656,103, issued on June 16, was assigned to SAMSUNG DISPLAY Co. LTD. (Yongin-si, South Korea).
"Plurality layer thickness measuring device and method with fast fourier transform" was invented by Jonghwan Lee (Yongin-si, South Korea) and Yong Jun Park (Yongin-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A thickness measuring device includes: a light source circuit including: a light source which irradiates light to a surface of a substrate including a plurality of thin films and a lens which magnifies light emitted from the light source or reflected from the surface of the substrate, a detector circuit including a spectrometer which mea...