ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,560,553, issued on Feb. 24, was assigned to SAMSUNG DISPLAY Co. LTD. (Gyeonggi-Do, South Korea).
"Laser crystallization monitoring device and method of laser crystallization monitoring using the same" was invented by Ji-Hwan Kim (Yongin-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A laser crystallization monitoring device includes a stage that supports a substrate, a laser beam generator that emits a laser beam to the substrate, a mirror that reflects the laser beam emitted from the laser beam generator and that rotates around a rotation axis, a first telecentric f-theta lens located on the laser beam path between the mirror and the su...